De-coupling capacitors produced by utilizing dummy conductive structures integrated circuits

ABSTRACT

A de-coupling capacitor module using dummy conductive elements in an integrated circuit is disclosed. The de-coupling module comprises at least one circuit module having one or more active nodes, and at least one dummy conductive element unconnected to any active node, and separated from a high voltage conductor or a low voltage conductor by an insulation region to provide a de-coupling capacitance.

This application is a divisional of U.S. patent application Ser. No.11/650,028 filed Jan. 5, 2007, which is a divisional of U.S. patentapplication Ser. No. 10/952,259 filed Sep. 27, 2004, both of which areexpressly incorporated by reference herein in their entireties.

FIELD OF THE INVENTION

The present invention relates generally to integrated circuits (IC), andmore particularly to the reduction of IC power noise generation throughthe utilization of dummy conductor configurations to increase thede-coupling capacitance within the IC.

BACKGROUND

Capacitors are a class of passive electronic elements useful forreduction of unwanted noise, for coupling of AC signals, and forconstructing timing and phase shift networks. They are relatively bulkydevices that store energy in electrostatic fields. The microscopicdimensions of today's ICs preclude the fabrication of more than a fewhundred pico-farads of capacitance in an IC. Since conventional ICcapacitor construction techniques limit an IC to a few hundredpico-farads, larger capacitors must reside off-chip (located on theassociated printed circuit board). These off-chip capacitors are bulkyand require significant PCB board space as well as additional materialand processing costs. Also, due to their increased distance from thenoise generating point within the IC, these off-chip capacitors are notas effective in IC noise reduction as the internal capacitors.

All of the capacitors used in ICs are of the sort called “parallelplate” capacitors, which consist of two conductive plates called“electrodes” attached to either side of a slab of insulating materialtypically known as dielectric. In the simple parallel-plate capacitor,the two electrodes are assumed to have the same dimensions and to residedirectly opposite from one another. The value of the simpleparallel-plate capacitor can be computed using the following approximateequation:C=0.0885A(e _(r))/t

where C is the capacitance in pico-farads, A is the area of eitherelectrode in square microns (um²), t is the thickness of the dielectricin Angstroms, and e_(r) is a dimensionless constant called the “relativepermittivity.”

e_(r) depends upon the nature of the dielectric and is sometimes calledthe “dielectric constant.” Consider a capacitor with a plate area of 0.1mm² constructed using a 200 A dry oxide film. If the dielectricpermittivity is 4, then the capacitance will be approximately 180pico-farads. This example explains why it is difficult to obtaininternal capacitors of more than a few hundred pico-farads. As the ICgeometries delve into the sub-micron level, internal IC capacitance willcontinue to decrease. Reducing the thickness of the dielectric increasesthe capacitance, but also increases the electric field across thedielectric. If the electric field increases beyond a certain point, acatastrophic short circuit of the capacitor is possible.

Current ICs have two typical capacitor types, either MOS capacitors orpoly-poly capacitors. MOS capacitors consist of a thin layer of grownoxide formed on a silicon diffusion that serves as one of theelectrodes. The other electrode consists of either metal or dopedpolysilicon. If the gate oxide is used to form a MOS capacitor, theresulting structure is called a “gate oxide capacitor”.

MOS capacitors have a number of disadvantages. These MOS capacitors aredesigned into the IC to provide as much de-coupling capacitance aspossible to minimize IC internal noise generation. It utilizes unusedareas within the IC. However, these devices require a large amount ofchip area (typically 10-15% of chip area) that could have been used foradditional circuitry or for a higher density of IC devices per wafer.Also, MOS devices have an inherently large device leakage currentthrough the thinner gate oxide, especially for 90-nanometer and smallerIC geometries. This leakage current causes excessive power dissipationwithin the IC in both static and dynamic states. Also, because of thethin gate oxide layer in MOS devices, these devices are more susceptibleto electro-static discharge (ESD) anomalies.

Poly-poly capacitors employ two polysilicon electrodes in combinationwith either an oxide or oxide-nitride-oxide (ONO) dielectric. Many CMOSand Bi-CMOS processes already incorporate multiple polysilicon layers,so poly-poly capacitors do not necessarily require any additionalmasking steps. Poly-poly capacitors normally reside over field oxide.Oxide steps should not intersect the structure because they can causesurface irregularities in the lower capacitor electrode.

Both the MOS capacitor and the poly-poly capacitor structures areconsidered thin-film capacitors. The microscopic dimensions of today'sintegrated circuits preclude the fabrication of more than a few hundredpico-farads of capacitance in an IC using either the MOS or poly-ploycapacitors.

Desirable in the art of IC design are additional circuits to reduce ICpower system internal power noise generation by increasing the internalIC de-coupling capacitance between the IC power and ground.

SUMMARY

In view of the foregoing, this invention provides a de-couplingcapacitor module using dummy conductive elements in an integratedcircuit and the method for forming the same. The de-coupling modulecomprises at least one circuit module having one or more active nodes,and at least one dummy conductive element unconnected to any activenode, and separated from a high voltage conductor or a low voltageconductor by an insulation region to provide a de-coupling capacitance.

Although the invention is illustrated and described herein as embodiedin circuits and methods to reduce IC power noise generation through theincorporation of additional internal IC de-coupling capacitance, it isnevertheless not intended to be limited to the details shown, sincevarious modifications and structural changes may be made therein withoutdeparting from the spirit of the invention and within the scope andrange of equivalents of the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 presents a conventional IC interleaved metal layer structure.

FIG. 2 illustrates a dummy conductor structure that adds additional ICde-coupling capacitance in accordance with one embodiment of the presentinvention.

FIG. 3 illustrates a dummy conductor structure that adds additional ICde-coupling capacitance in accordance with another embodiment of thepresent invention.

DESCRIPTION

The present invention provides a de-coupling system to reduce ICinternal power noise generation and static/dynamic IR-drop. Thede-coupling system adds internal IC de-coupling capacitance between ahigh voltage conductor, such as a power line, and a low voltageconductor, such as a grounded line. The de-coupling system can beimplemented by utilization of “line style” and “square style” dummyconductive elements in the same or different layers within the IC. Theincorporation of these two styles can be easily identifiable from the IClayout.

FIG. 1 presents a conventional IC interleaved metal layer structure 100.A box 102 shows a lateral view of an IC with six metal layers (M1-M6)and an IC substrate layer. The first metal layer M1 is a ground layerand is tied directly to the IC substrate by a contact 104. Both thesubstrate layer and the M1 layer are tied to ground, as represented bythe label GND. In a typical interleaved layer structure, each subsequentvertical metal layer (M1 through M6) alternates between ground or VCC(as shown in the box 102) to take advantage of a plurality of intrinsiccapacitances 106 generated between the various metal layers. The GNDlayers (M1, M3 and M5) are tied to IC GND, while the VCC layers (M2, M4and M6) are tied to VCC via connections between layers. The intrinsiccapacitances 106 in effect act as a system of parallel de-couplingcapacitances and are useful for internal power noise reduction. Theintrinsic capacitances 106 add to the MOS and poly-poly capacitance thatis already designed into the IC for de-coupling. The total capacitance,or the aggregate capacitance of the intrinsic capacitances 106, varies,however, by the extent of the metal on each layer as well as by thephysical distance between the layers.

FIG. 2 illustrates the new “line style” dummy conductive element thatadds additional de-coupling capacitance to an IC in accordance with oneembodiment of the present invention. The drawing 200 represents asection of an IC utilizing the “line style” dummy conductive elementsfor additional de-coupling capacitance. Capacitance formed in thisconfiguration is called “Metal on Metal” (MoM) capacitance. Box 202shows the boundaries of this section of the IC with its various circuitmodules 204, a high voltage conductor 206, such as a power line, a lowvoltage conductor 208, such as a grounded line, and dummy conductorelements 210 and 212, such as metal lines and doped polysilicon lines.The high voltage conductor 206, low voltage conductor 208, and thecomponents within the circuit modules 204 are connected to at least oneactive node that interconnects them for a normal operation.

The dummy conductive elements 210 and 212 are connected to a voltagedifferent from its neighboring high voltage conductor 206 or the lowvoltage conductor 208, and are separated therefrom by an insulationregion. For example, the de-coupling capacitance is formed by runningthe grounded dummy conductive elements 210 adjacent to the high voltageconductor 206, such as a Vcc power line, or running VCC connected dummyconductive elements 212 adjacent to the low voltage conductor 208, suchas a ground line. These dummy conductive elements 210 and 212 are notconnected to any active node within the IC circuit other than itsconnection to ground or VCC for the creation of the de-couplingcapacitance, and they are appropriately named “dummy conductiveelement.” For the purpose of this invention, the term “active node”refers to nodes in an active circuit module that are not connected toany power supply. These dummy conductive elements can be routedthroughout the layer next to VCC or GND lines wherever an unused areaexists. It can also be routed around circuit modules 204 if required.The de-coupling capacitance 214 is formed by the parallel routing of thedummy conductive elements 210 close to the high voltage conductor 206.The maximum de-coupling capacitance 214 is created by routing themaximum parallel length between these lines. The de-coupling capacitance216 is also formed by the parallel routing of the VCC connected dummyconductive elements 212 close to the low voltage conductors 208. Asbefore, the maximum de-coupling capacitance 216 is created by routingthe maximum parallel routing length between these lines. Additionalde-coupling capacitance 218 may be formed where the grounded dummyconductive elements 210 parallel other VCC connected dummy conductiveelements 212. The goal of adding de-coupling capacitance for IC powernoise reduction is to create the maximum de-coupling capacitancepossible rather than a specific capacitance value. The capacitancegenerated can be optimized by the selection of the proper line width,spacing between lines, and length of the parallel routing.

The “line style” dummy conductive structure has a number of advantages.For example, it has no leakage current to increase the IC powerdissipation. It occupies only unused chip area which will not affect theproduct yield. Further, no circuit design changes are needed, andfinally the layer layout may be changed to add the dummy lines usingstandard EDA tools.

In addition to the “line style” dummy conductive structures, a “squarestyle” dummy metal structure also helps to optimize the de-couplingcapacitance by utilizing large portions of the unused chip area, as willbe explained below.

FIG. 3 illustrates the “square style” dummy conductive structure thatadds additional IC de-coupling capacitance in accordance with a secondembodiment of the present invention. A section 300 of an IC is shownutilizing the “square style” dummy conductive structure for additionalde-coupling capacitance. The box 302 shows one layer of this IC with itsvarious circuit modules 304, a high voltage conductor 306, such as VCCpower line, a low voltage conductor, such as ground line 308, groundeddummy conductive units (310, 318 and 320) and VCC dummy conductive units(312 and 316). The dummy conductive units are interconnected by lines322 to form high or low voltage strips, such as VCC or GND strips, thatform intrinsic capacitors between the units and the high voltage or lowvoltage conductors, as well as between the units themselves. Theadvantage of this square dummy conductive structure is that all unusedchip areas may be utilized to increase the de-coupling capacitance bystacking the units as required to obtain inter-unit capacitance as wellas the capacitance to the high or low voltage conductors. Note that astrip 320 of six dummy conductive units is not adjacent to either thehigh voltage conductor or the low voltage conductor. In other words, thestrip 320 provides inter-unit capacitance to the strips placed in alayer that is immediately adjacent to, either above and/or below, thecurrent layer. This provides additional de-coupling capacitance thatwould otherwise be unused. Each of these strips of units are connectedto other IC layers of either ground or VCC by interconnections 314 thattranslate from one layer to another providing interconnections ofsignals, VCC and GND. When inter-layer arrangements are made to formdecoupling capacitance, a predetermined “location” system may be used toassure that the metal structures, either the metal lines or metalsquares, stack up to have vertical overlaps. For example, a gradient orcoordinate system can be implemented to arrange the metal structures.

The goal of adding de-coupling capacitance for IC power noise reductionis to create the maximum de-coupling capacitance possible rather than aspecific capacitance value. The capacitance generated can be optimizedby the selection of the proper unit width, spacing between units, lengthof the connected strips and the inter-unit capacitance. Note that whileunits are shaped in squares in FIG. 3, they may be other shapes, such astriangles, rectangles, polygons, circles, and ovals.

This “square style” dummy metal structure has a number of advantages.For example, the structure has no leakage current to increase the ICpower dissipation. It occupies only unused chip areas which will notaffect the product yield, and covers a relatively large area to increasethe capacitance. Further, no circuit design changes are needed, andfinally, the layer layout may be changed to add the dummy square usingstandard EDA tools.

When placing the dummy metal structures in a circuit for formingdecoupling capacitors, one or more active nodes of an active circuitmodule are first formed. For example, elements for active or functionalcircuit modules such as input/output circuit modules are placed first.The active circuit modules have one or more active nodes that need to berouted by conductive materials such as metal lines to make the modulefunctional. When the locations for these modules are identified, one ormore metal structures, whether of the “line style” or “square style,”are placed in one or more unused areas. These metal structures are notconnected to any active node of the active circuit module. The routingof the active nodes of the circuit module can happen before orsimultaneously with the placement of the dummy metal structures.Depending on the design, the metal structures can be formed on the samelayer as well as different layers as described above. Since the dummymetal structures are used for de-coupling purposes, one or more contactsare placed to connect one or more metal structures to either a powersupply voltage level or a ground level. Since the de-coupling capacitorswill have an impact on the timing performance of the active circuitmodules, initially adjusting a timing configuration of the activecircuit module is necessary before the de-coupling capacitors areformed. Once all the decoupling capacitors are formed by the dummy metalstructures, re-adjusting timing configuration of the active circuitmodule is necessary.

In addition to various functional advantages that the de-couplingcapacitors made of dummy conductive structures or elements can provide,it is understood that dummy metals are placed in the circuit in aconventional process for simply occupying the unused areas. The presentinvention turns a wasted resource into use without adding muchprocessing overhead, thus providing a very economical solution forreducing internal power noise and solving IR issues.

The above invention provides many different embodiments or examples forimplementing different features of the invention. Specific examples ofcomponents and processes are described to help clarify the invention.These are, of course, merely examples and are not intended to limit theinvention from that described in the claims.

Although illustrative embodiments of the invention have been shown anddescribed, other modifications, changes, and substitutions are intendedin the foregoing invention. Accordingly, it is appropriate that theappended claims be construed broadly and in a manner consistent with thescope of the invention, as set forth in the following claims.

1. A de-coupling capacitor module in an integrated circuit comprising: aplurality of circuit modules having one or more active nodes; aplurality of dummy conductive elements unconnected to any active node; ahigh voltage conductor between two of the dummy conductive elementswhich have a voltage lower than the high voltage conductor, the highvoltage conductor separated by an insulation region from each of the twodummy conductive elements to provide a first de-coupling capacitance;and a low voltage conductor between another two of the dummy conductiveelements having a voltage higher than the low voltage conductor andseparated by a further insulation region from each of the other twodummy conductive elements to provide a second de-coupling capacitance,wherein the dummy conductive elements are substantially parallel amongthemselves, the dummy conductive elements being located outside of anarea occupied by the circuit modules, so that none of the dummyconductive elements overlie or underlie any of the circuit moduleshaving active nodes.
 2. The de-coupling module of claim 1 wherein thehigh voltage conductor, the low voltage conductor, and the dummyconductive elements are formed on the same metal layer of the integratedcircuit.
 3. The de-coupling module of claim 1 wherein the high voltageconductor, the low voltage conductor, and the dummy conductive elementsare formed on two or more different metal layers of the integratedcircuit.
 4. The de-coupling module of claim 1 wherein one of the dummyconductive elements is connected to a voltage different from that ofeither the high or low voltage conductor that is immediately adjacent toit for providing a de-coupling capacitance.
 5. The de-coupling module ofclaim 1 wherein the dummy conductive elements are located in an areaunoccupied by any of the active nodes.
 6. The de-coupling module ofclaim 1, wherein the dummy conductive elements include three elongatedelements parallel and adjacent to three respective sides of at least oneof the circuit modules.
 7. The de-coupling module of claim 1 wherein thedummy conductive elements include two elongated elements connected toeach other and parallel and adjacent to two respective adjacent sides ofat least one of the circuit modules.
 8. The de-coupling module of claim1 wherein the dummy conductive elements include two elongated dummyconductive elements parallel and adjacent to the same high voltageconductor or low voltage conductor, on opposite sides thereof.
 9. Thede-coupling module of claim 1 wherein the dummy conductive elementincludes: first and second elongated dummy conductive elements paralleland adjacent to the same high voltage conductor, on opposite sidesthereof; and third and fourth elongated dummy conductive elementsparallel and adjacent to the same low voltage conductor, on oppositesides thereof.
 10. The de-coupling module of claim 9 wherein the firstand second elongated dummy conductive elements and the high voltageconductor therebetween are located on a first side of at least one ofthe circuit modules, and the third and fourth elongated dummy conductiveelements and the low voltage conductor therebetween are located on asecond side of the at least one circuit module, the second side beingopposite the first side.
 11. The de-coupling module of claim 10 whereinthe first, second, third and fourth dummy conductive elements are formedon the same metal layer.
 12. The de-coupling module of claim 1 whereinthe high voltage conductor, the low voltage conductor, and the dummyconductive elements are formed on the same metal layer as a layer of oneof the circuit modules.
 13. A de-coupling capacitor module in anintegrated circuit comprising: a plurality of circuit modules having oneor more active nodes; one or more dummy conductive elements unconnectedto any active node; and one or more high voltage conductor or a lowvoltage conductor separated by an insulation region from at least one ofthe dummy conductive elements to provide a de-coupling capacitance,wherein the dummy conductive elements are substantially parallel amongthemselves and located in an area unoccupied by any of the circuitmodules, the dummy conductive elements being located outside of an areaoccupied by the circuit modules, so that none of the dummy conductiveelements overlie or underlie any of the circuit modules having activenodes; wherein the one or more dummy conductive elements include twoelongated dummy conductive elements parallel and adjacent to the samehigh voltage conductor or low voltage conductor, on opposite sidesthereof; wherein the two elongated dummy conductive elements and thehigh voltage conductor or low voltage conductor are formed on the samemetal layer of the integrated circuit.
 14. A de-coupling capacitormodule in an integrated circuit comprising: a plurality of circuitmodules having one or more active nodes; a plurality of dummy conductiveelements unconnected to any active node; and one or more high voltageconductor or a low voltage conductor separated by an insulation regionfrom at least one of the dummy conductive elements to provide ade-coupling capacitance, wherein the dummy conductive elements aresubstantially parallel among themselves and located in an areaunoccupied by any of the circuit modules, so that none of the dummyconductive elements overlie or underlie any of the circuit moduleshaving active nodes, and the high voltage conductor, low voltageconductor and dummy conductive elements are arranged in a set such thata voltage of each successive member of the set alternates between a highvoltage and a low voltage.
 15. The de-coupling module of claim 14wherein the high voltage conductor, the low voltage conductor, the dummyconductive elements and the circuit module are formed on the same metallayer of the integrated circuit.
 16. The de-coupling module of claim 14,wherein the dummy conductive elements include three elongated elementsparallel and adjacent to three respective sides of the at least onecircuit module.
 17. The de-coupling module of claim 14 wherein the dummyconductive elements include two elongated elements connected to eachother and parallel and adjacent to two respective adjacent sides of theat least one circuit module.
 18. The de-coupling module of claim 14wherein the dummy conductive elements include two elongated dummyconductive elements parallel and adjacent to the same high voltageconductor or low voltage conductor, on opposite sides thereof.
 19. Thede-coupling module of claim 18 wherein the two elongated dummyconductive elements and the high voltage conductor or low voltageconductor are formed on the same metal layer of the integrated circuit.20. The de-coupling module of claim 14 wherein the dummy conductiveelement includes: first and second elongated dummy conductive elementsparallel and adjacent to the same high voltage conductor, on oppositesides thereof; and third and fourth elongated dummy conductive elementsparallel and adjacent to the same low voltage conductor, on oppositesides thereof.